IPEX-700 Excimer Lasers

193-351 nm; Energy 0.150-0.700 J; Max. Rep-rate 10-100 Hz; Average Power 3-40 W; Pulse Duration 12-20 ns FWHM; Beam Size 12x26, 12x28 mm; Medium Duty Cycle Operation

Designed for medium duty cycle operation in industrial and R&D environments, Light Machinery’s IPEX-700 series of excimer lasers deliver high-power ultraviolet laser machining combined with state-of-the-art performance. LightMachinery excimer lasers are used by leading R&D scientists all over the world.

The largest single cost of operating an excimer laser is laser gas consumption while running the laser (also known as dynamic gas lifetime). Incorporating LightMachinery’s proprietary ICON™ (Integrated Ceramic on Nickel) and patented exciPure™ technologies, IPEX lasers offer extremely long gas lifetimes, superior optical stability and precise control of laser operating parameters. With exciPure™, LightMachinery has achieved a 10x improvement in gas usage over competing lasers. This technological breakthrough leads to dramatically less cost to run your laser.

EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance. Easy to use, simple to service and economical to operate, IPEX-700 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today.

IPEX-700 lasers are ideal for applications such as pulsed laser deposition (PLD) and can be operated from any computer using Windows 7 or 8 – a Microsoft® Surface Pro 3 is included for your convenience.

Key Features:

• Medium Duty Cycle Operation
• Wavelengths: 193 nm (ArF), 248 nm (KrF), 308 nm (XeCl), 351 nm (XeF)
• Maximum Pulse Energy: 230 to 700 mJ
• Stabilized Pulse Energy: 150 to 600 mJ
• Stabilized Average Power: 3 to 40 W
• Maximum Repetition Rate: 10 to 100 Hz
• Pulse Duration: 12 to 20 ns FWHM
• exciPure™ Technology for 10x Gas Lifetimes and Lowest Cost of Operation
• No Expensive Cryogenic Gas Purifier Required
• EasyClean Automated Optics Seals to Retain Gas Fill and Reduce Downtime During Optics Maintenance
• Optional High-Brightness Optics for Applications Requiring Low Beam Divergence or Extended Coherence Length
• High-stability Optics Mounts for Ultimate Beam Pointing Accuracy
• Simple Integration into Industrial Processing Systems
• Microsoft® Surface Pro 4 Remote Control for Simple Operation
• Simplified Optical Maintenance, Retained Gas Fill and Passivation
• No Realignment Required After Cleaning or Replacing Optics
• Fast, Precise Energy Stabilization (<1.0%, KrF Gas) in Internal, Burst and External Trigger Modes
• Removes Particulates and Maintains Optics Cleanliness
• Pointing Stability: 200 rad
• Beam Size: 12x26, 12x28 mm
• Beam Divergence (Vertical x Horizontal): 1x3 mrad, Can be Reduced to 0.25 mrad With High-brightness Unstable Resonator Optics
• Cooling Requirements: Optional Air Cooling up to 25 Hz Operation, Water Cooling at Higher Repetition Rates
• Laser Gas: Premix or Individual Cylinders

Applications: Pulsed Laser Deposition; Precision Manufacturing; Material Processing; Drilling; Wire Stripping; Scientific Research; LIDAR; Laser Induced Breakdown Spectroscopy