SUPERSCAN 2-Axis Deflection Units

Wavelength 266-1100 nm; Type IR, Visible, UV, Mid-IR; Scan Angle 4,9-60 mrad; Active Aperture 1.0-60 mm; Operating Frequency 9.4 µm-432 MHz; Optical Material Germanium, Sapphire, Fused Silica, Crystalline Quartz, Tellurium Dioxide G&H acousto-optic deflectors (AODF) provide precise spatial control of an optical beam, whether performing 1D or 2D scanning or executing beam deflection through a fixed angle. The acousto-optic deflectors offer highly uniform diffraction efficiency across the full scan angle, with consistent power throughput for scanning applications like material processing and digital imaging. Gooch & Housego offers a wide range of standard deflectors and RF drivers for wavelengths from 266-1500 nm. Key Features: Visible and NIR wavelength products based on tellurium dioxide crystals, grown in-house UV wavelength products based on fused silica and crystal quartz Broad bandwidth products based on a longitudinal mode approach using a phased array of piezoelectric elements High efficiency products based on slow shear deflection using parallel tangents off-axis interactions Selecting the right RF driver is important to achieve the desired scanning speed and accuracy. Deflectors used in scanning or writing applications require a variable frequency source which is both stable and highly linear. 2D UV beam scanning may be achieved by cascading two UV deflectors in series. Gooch & Housego’s flexible functionality AODF Dual Driver with phase synchronized outputs offers the optimum in RF driver control for 2D scanning.Applications: Digital Imaging; Heterodyne Interferometry; Laser Cooling; Laser Marking; Laser Tweezers; Material Processing; Micromachining; Microscopy; On-Line Process Control; Optical Inspection; Photolithography; Printing Series Wavelength Type Scan Angle Active Aperture Operating Frequency Optical Material Downloads AODF 4070 N/A Mid-IR 60 mrad 9 mm 9.4 µm Germanium Datasheet Driver Driver AODF 2690-UV 266 - 355 nm N/A up to 4.9 mrad up to 7 mm 100 - 432 MHz Sapphire Datasheet Driver Driver AODF 4200-UV 266 nm UV 5.5 mrad 1.0 x 60.0 mm 135 - 265 MHz Fused Silica Datasheet Driver Driver AODF 4170 355 nm UV 4.9 mrad 7 mm 130 - 210 MHz Crystalline Quartz Datasheet Driver Driver AODF 4100-UV 364 nm UV 29.5 mrad 4.0 x 14.0 mm 75 - 125 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4200-VI 405 - 488 nm Visible 58 mrad 4.8 mm 150 - 250 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4090-7 440 - 530 nm Visible 44 mrad 8.5 mm 60 - 115 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4100-VI 488 nm Visible 39.5 mrad 4.0 - 14 mm 75 - 125 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4055-4 780 - 980 nm IR 44.3 mrad 3.5 x 14 mm 35 - 70 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4210-IR 830 nm IR 27.6 mrad 2.0 - 6.0 mm 140 - 280 MHz Tellurium Dioxide Datasheet Driver Driver AODF 4090-6 1064 nm IR 56 mrad 2 mm 72.5 - 107.5 MHz Tellurium Dioxide Datasheet Driver   AODF 4075-IR 1065 - 1100 nm IR 8.1 mrad 2.5 mm 59 - 91 MHz Tellurium Dioxide Datasheet Driver Driver

Optical Deflection ±0.325 rad; Processing Speed 30 rad/s; Positioning Speed 30 rad/s; Digital Control via RL3-100 Protocol; Resolution 0.76 µrad Raylase’s AM-MODULE NEXT GEN prefocusing deflection units for fiber-coupled lasers feature homogeneous power density and exceptionally low drift values. They enable ultra-dynamic, rapid processing with flexible spot diameters. Full digital, model-based control is ensured with absolute precision. Up to 4 modules can be operated simultaneously over one construction field. Direct connection of a photodiode or pyrometer for process control is also possible. For more effective process monitoring, the BASE-Module can be expanded with the SENSOR-Module. The two integrated sensors not only ensure customized quality control, they also enable archiving and process control. Focus tracking is built-in for one of the sensors. Data can be preprocessed either directly in the expanded camera electronics or on a powerful frame grabber. The AM-MODULE NEXT GEN prefocusing deflection units are available in two variants: As a standard module or a high-performance module with fully digitally galvo-scanner. The high-performance module is designed for use in the manufacture of ultra-high precision components which must satisfy particularly high safety specifications. This application is of particular interest for users in the aerospace industry, automotive manufacturing and medical engineering. Key Features: Fast Beam Deflection With Uniform Power Distribution Over the Entire Field High Dynamic for 3D-Production of Metal Parts for Working Fields From up to 600 mm x 600 mm Innovative Design for Effective Full Parallelization Over the Working Field Direct Fiber Connection and Zoom Axis for Highly Dynamic Change of Spot Size On-Axis Process Monitoring and Control Using Various Sensors With Focus Tracking Control: Via RL3-100 Protocol 20 Bit Optical Deflection (typ.): ±0.325 rad Resolution RL3-100, 20 Bit: 0.76 µrad Repeatability (RMS): <0.4, <2.0 µrad Position Noise (RMS): <2.0, <3.2 µrad Max. Temperature Drift: 8, 15 ppm/K Gain, 10, 15 µrad/K Offset Long-term Drift (8 h): <50, <60 µrad, <30, <40 µrad (Water Temperature Control) Beam Divergence: 80 to 140 mrad (Typ.), 90 to 150 mrad (Max.) Tuning: Hatching (H) Processing Speed: 30 rad/s Positioning Speed: 30 rad/s Tracking Error: 0.23, 0.25 ms Step Response Time (@1% of Full Scale): 0.66, 0.70 ms Tracking Error Focusing Unit: 1.5 ms Speed of Moving Lens: 880 mm/s Power Supply: +48 VDC, 6 A RMS, max. 10 A Temperature Range: +15°C to +40°C Protection: IP64 Dimensions: 284 x 150 x 393 mm (BASE Module), 315 x 150 x 393 mm (SENSOR Module), 589 x 150 x 393 mm (Total) Weight: Approx. 15 kg (BASE Module), 14 kg (SENSOR Module) Applications: Manufacturing of Ultra-high Precision Components With Particularly High Safety Specifications; Aerospace Industry; Automotive Manufacturing; Medical Engineering

Optical Deflection ±0.393 rad; Processing Speed 10-65 rad/s; Positioning Speed 10-65 rad/s; Max. Input Aperture 15, 20 mm; Digital Control via SL2-100, RL3-100, or XY2-100 Protocol Raylase’s AXIALSCAN series of prefocusing deflection units offer very small spot diameters at large field sizes or processing areas, flexibility, high deflection speed, long-term stability and low drift values. AXIALSCAN-20/-30 deflection units feature high power density in the spot, enabling new application and reduced system costs. Deflection units are designed for field sizes from 100 mm x 100 mm up to 1,800 mm x 1,800 mm. These units are available with options like motorized adjustment of the operating field steered by the stepper motor interface, high-power version with optimized Nd: YAG and CO₂ optics for up to 4 kW, as well as a high-speed version with double motor-driven Z-axis and extremely light and stiff high-performance mirrors. The AXIALSCAN-30 DIGITAL II deflection units with the LT-II-15 digital linear translator module ensure exceptionally low drift values at 20 Bit position resolution. Heat development is greatly reduced thanks to the PWM output stages used. Thanks to optimized lenses for CO₂ wavelength and 1060 to 1070 nm, the AXIALSCAN-30 DIGITAL II HP deflection units can handle laser power up to 4 kW. The pre-focusing deflection units of the AXIALSCAN-50 DIGITAL II series feature cutting-edge digital control electronics. Various tuning options are available, enabling application-specific adjustment of control parameters and, in combination with the SC mirrors, produce exceptional deflection speeds and dynamic values. The AXIALSCAN-50 DIGITAL II can be equipped with a range of tuning options (VC, LS and M). Default tunings are configurable. The AXIALSCAN-FIBER 20/30 deflection systems can be easily integrated into any laser system by means of various mechanical interfaces below, to the side (robot flange is possible) and from above. The integrated fiber collimator enables connection of the laser fiber without beam path alignment. A second external protective window can be quickly and easily replaced, with optional monitoring available. Camera and welding monitoring systems can be adapted to the process light output without aberrations. The AXIALSCAN FIBER-30 is completely dust-proof and therefore ideal for use in a harsh industrial environment. Suitable mirrors are available both for high-performance welding applications with laser power in the multi-kilowatt range and for highly dynamic applications. Optical configurations are available for all standard beam parameters of lasers and their fibers. The AXIALSCAN FIBER-50 deflection systems ensure that the laser process is highly dynamic and precise, even when the workpiece is passing under the deflection unit at varying speed. The pre-focussing deflection unit can, among other things, separate the contours of electrical connection surfaces (tabs) on batteries with precision during the foil winding process. This benefit is possible thanks to the pulsed laser beam – highly dynamic with position accuracy – that is directed from the AXIALSCAN FIBER-50 deflection unit onto the workpiece. It works with the smallest spot size on processing field sizes of between 300 x 300 mm and 850 x 850 mm. Depending on the model, the AXIALSCAN deflection units are compatible to the XY2-100 (16 Bit) protocol, the SL2-100 (20 Bit) protocol, or the RL3-100 (20 Bit) standards. They can be digitally controlled by a control card, such as the SP-ICE-1 PCIe PRO or SP-ICE-3. Lenses, protective glass, scan mirrors, deflection mirrors and objectives with optimized mounts are available for all typical laser beam source types. We are happy to help you put together the perfect configuration for your application – get in touch with AMS Technologies to discuss your project’s requirements. Key Features: For Large Areas With Small Spot Size and 3D-Applications For Applications at up to 5 kW Laser Power High-speed Z-Axis With Double Motor Option (AXIALSCAN-20/-30) and Digitally Controlled (AXIALSCAN-30/50 DIGITAL II) Control: Via SL2-100 Protocol 20 Bit, RL3-100 Protocol 20 Bit, or XY2-100 Protocol 16 Bit Variable Processing Field Sizes: 100 x 100 up to 1,800 x 1,800 mm Reduced Power Loss and Heat Development Due to Digital PWM Output Stages (AXIALSCAN-30 DIGITAL II) Optimized long-term drift for highly challenging process quality (AXIALSCAN-30/50 DIGITAL II/HP) Optional: Pilot laser function (AXIALSCAN-50 DIGITAL II) Max. Input Apertures: 15, 20 mm Optical Deflection (typ.): ±0.393 rad Resolution XY2-100, 16 Bit: 12 µrad Resolution SL2/RL3-100, 20 Bit: 0.76 µrad Repeatability (RMS): <0.4, <2.0 µrad Position Noise (RMS): <2.0, <3.2 µrad Max. Temperature Drift: 8, 15 ppm/K Gain, 10, 15 µrad/K Offset Long-term Drift (8 h): <50 to <100 µrad, <30, <40 µrad (Water Temperature Control) Beam Displacement: 25.63 to 60 mm Tuning: VC, H, M, FV, LS Processing Speed: 10 to 65 rad/s Positioning Speed: 10 to 65 rad/s Tracking Error: 0.155 to 1.5 ms Step Response Time (@1% of Full Scale): 0.54 to 1.9 ms Power Supply: ±15 to ±18 VDC, 7.5 A RMS, max. 10 A, +30/+48 VDC, 4, 6 A RMS, max. 8, 10 A Temperature Range: +15°C to +35°C Protection: IP 54, IP64 Dimensions: 270 x 140 x 320 mm, 380 x 200 x 494 mm, 550 x 280 x 230 mm Weight: Approx. 5.5 to 28 kg Key Features AXIALSCAN-FIBER 20/30/50: “High Power” Version for Welding in the E-mobility Market or “High Dynamic” Version for the Powder-bed Process (SLM) in Additive Manufacturing 4-times Productivity by Quadruple Design With 100 % Overlapping Above the Production Panel Dust-proof and Tailored to the Requirements of Industrial Powder Bed Machines Easy System Integration With Direct Laser-fiber Connection and Multiple Mounting Possibilities “On-Axis” Quality Control by Integrated Process-monitoring Interface (AXIALSCAN-FIBER 50) Wide Range of Options for Coaxial Inline Process Control (AXIALSCAN-FIBER 50) Sharp and Precise Cutting of Battery Foils (AXIALSCAN-FIBER 50) Applications: Scribing; Cutting; Perforating; Welding; Drilling; Marking-and-processing-On-The-Fly (MOTF) Applications; Bleaching; 3D Applications; Additive Manufacturing (SLM); Packaging Industry; Micro-material Processing; Processing of Moving Parts; E-Mobility; Welding of Bipolar Plates for Fuel Cells

Definition of Laser Process Parameters; Creating Drill Patterns, Text Objects and Filling Structures; Bitmap Marking; Multiplying Container; Comprehensive Vector Editing; Pen Management/Assignment; Job Analytics; Integration of SP-ICE-3 Control Card Raylase sees itself as a full-range supplier, offering a complete portfolio – from deflection units to control electronics and the corresponding laser processing software. Raylase’s deflection unit software makes tailor-made solutions possible and guarantees that machine manufacturers can drive their product development forward and venture into the high-performance arena. The resulting combination of lasers, laser deflection units and the corresponding software improves performance and reduces costs. The RAYGUIDE software architecture is designed to respond quickly and flexibly to ever-changing and increasingly complex applications, while simultaneously guaranteeing a high degree of product stability. RAYGUIDE offers a wide range of features, and its functional scope will be enhanced on an ongoing basis to meet your growing requirements. For customers that want to access RAYGUIDE functions from their own user interfaces, Raylase offers a software development kit (SDK). This is a program library that also incorporates all the application benefits of RAYGUIDE. The interface is programmed in the Dot.Net environment. The Multi-Point Editor is a software application for creating and editing RAYLASE correction files to adapt them to the individual opto-mechanical situation of each laser system. The correction files provided for your deflection unit by the manufacturer already take into account the respective wavelength, the aperture of the deflection unit, the working distance and much more. In this way, sufficient accuracies can be ensured for many applications. Nevertheless, each system has individual tolerances. In addition, alignment errors occur during the setup of your system, which must be compensated for in order to achieve even higher accuracies in scan field calibration. Raylase provides you with the Multi-Point Editor software free of charge. You do not need a license to use it. NOTE: When using the RAYGUIDE laser process software, the Multi-Point Editor application is already included as an integral part. Key Features RAYGUIDE: Optically Innovative User Interface With User-defined Configuration of the Required Panels Full Integration of the Raylase SP-ICE-3 Control Card Equipped With Functions to Support all Existing and New Raylase Deflection Units Definition of Laser Process Parameters Creating Drill Patterns, Text Objects and Filling Structures Bitmap Marking, Multiplying Container, Pen Management/Assignment, Job Analytics Agile Architecture for Responding Quickly to New Requirements Easy Integration into Automated Production Environments Comprehensive Vector Editing: Powerful Toolbox to Optimize Vector Graphics Integrate Part or the Complete GUI into Your Machine’s HMI Use Plugins to Integrate Individual Functions into RAYGUIDE Powerful Multi-point Editor Tool is Integral Component of RAYGUIDE User Interface Manage Multiple Control Cards and Associated Deflection Units Emulated Control Card Allows to Perform Many tasks Without Connecting a Control Card Key Features MULTI-POINT-EDITOR: Calibration of the XY Correction Values Calibration of the Z Correction Values for the Third Optical Axis (if Available) Creation of a Correction Table for the Local Adjustment of Laser Power Creation of a Specially Defined Correction File by Entering Optical Parameters Direct Marking of the Calibration Pattern (in Connection With the Use of a SP-ICE-3 Control Card) Definition of a Sub-field (if Not the Whole Scan Field is Used) Selection From Various Calibration Patterns Direct Input of Scaling, Rotation, Offset and Trapezoidal Deviations Import Function of Measured Values Various Visualization Options of the Calibration Data for Validation of the Measured Values and Statistical Evaluation Applications: Marking (Bitmaps, Text, Codes, Graphics); Welding; Cutting; Perforating; Surface Processing; MOTF Processing; Preparation for Stand-alone Operation With the SP-ICE-3 control card

Optical Deflection ±0.393 rad; Processing Speed 30-200 rad/s; Positioning Speed 30-200 rad/s; Input Aperture 5, 10, 15 mm; Digital Control via SL2-100, RL3-100, or XY2-100 Protocol Raylase’s FOCUSSHIFTER series of prefocusing deflection units provides tiny spot diameters with flexible focusing range in Z-direction. The modular, compact, robust, and pre-aligned design (CE) makes integration easy. Deflection units for Nd:YAG and CO₂ lasers are designed for field sizes from 100 mm x 100 mm to 300 mm x 300 mm. The field sizes are determined by the f-theta objective type. Submodule for other wavelengths are available upon request. The FOCUSSHIFTER DIGITAL II deflection units provide flexible software-controlled focusing in the Z-direction, high deflection speed, long-term stability and exceptionally low drift values at 20 bit position resolution. Heat development is minimized as a result of the PWM output stages used. The third dimension (3D) is not always the nonplus ultra. The FOCUSSHIFTER-14 deflection units deliberately take a (half) step backwards to significantly increase the range of applications for you as a machine builder or integrator in the fields of e-mobility, solar/photovoltaics, and electronics/IT. The FOCUSSHIFTER-14 cleans component contact surfaces (paint, oxide layers, oil, insulation), cuts flexible PCBs, glass displays or polarization foils, texturizes or structures a wide variety of surfaces and connect components, resistance-trims 5G antennas – all this in two and a half dimensions (2.5D) with automatically shifting the focus – generated by the f-theta lens – either downwards or upwards, allowing you to process different height levels of the same workpiece. The deflection units are compatible with XY2-100 (16 Bit), SL2-100 (20 Bit) or RL3-100 (20 Bit). The units can be controlled digitally using a control card, such as SP-ICE-3 or SP-ICE-1 PCIe PRO, or via an analog current or voltage interface (FOCUSSHIFTER). Lenses, protective glass, mirror substrates, coatings, and objectives with optimized mounts are available for all typical laser types, wavelengths, light densities, focal lengths and processing areas. This makes it possible to process a wide range of tasks to the highest quality standards and with optimized throughput. Using telecentric F-Theta lenses enables an almost vertical processing beam over the entire field. Customer specific configurations are also possible – we are happy to provide a customized configuration for your application, get in touch with AMS Technologies to discuss your project’s requirements. Key Features: Variable, Easy-to adjust Focus Range in Z-Direction Modular and Compact Design for Easy Integration Excellent Price-performance Ratio Reduced Power Loss and Heat Development Due to Digital PWM Output Stages (FOCUSSHIFTER DIGITAL II) Control: Via SL2-100 Protocol 20 Bit, RL3-100 Protocol 20 Bit, or XY2-100 Protocol 16 Bit Available Input Apertures: 5, 10, 15 mm Optical Deflection (typ.): ±0.393 rad Resolution XY2-100, 16 Bit: 12 µrad Resolution SL2/RL3-100, 20 Bit: 0.76 µrad Repeatability (RMS): <0.4, <2.0 µrad Position Noise (RMS): <2.0, <4.5 µrad Max. Temperature Drift: 8, 15 ppm/K Gain, 10, 15 µrad/K Offset Long-term Drift (8 h): <50 to <150 µrad, <30 to <100 µrad (Water Temperature Control) Beam Displacement: 12.5 to 26.28 mm Tuning: LN, RA, C, VC, H, M, MA, W Processing Speed: 30 to 200 rad/s Positioning Speed: 30 to 200 rad/s Tracking Error: 0.10 to 0.9 ms Step Response Time (@1% of Full Scale): 0.33 to 0.69 ms Power Supply: ±15 to ±18 VDC, 7.5 A RMS, max. 10 A, +30/+48 VDC, 4 A RMS, max. 8 A Temperature Range: +15°C to +35°C Protection: IP 54, IP64 Dimensions: 202 x 159 x 150 mm, 330 x 105 x 134 mm Weight: Approx. 5.3 to 7.5 kg Applications: Deep Cutting; Deep Engraving; Deep Processing of Materials; In-glass Marking; Creation of 3D Images in Glass Blocks; Marking and Structuring at Various Heights; Cleaning Component Contact Surfaces of Paint, Oxide layers, Oil or Insulation; Cutting Flexible PCBs, Glass Displays or Polarization Foils; Texturizing or Structuring a Wide Variety of Surfaces and Connect Components; Resistance Trimming of 5G Antennas

Crystal-based Deflector; Scanning Angle ≤150 mrad; Scanning Speed ≤100 kHz; 488 to 3,500 nm NTT Advanced Technology’s KTN deflector module will realize new technological ideas, with ultra-high-speed scanning and arbitrary scanning. High-speed operation, which has not been supported by conventional technology, becomes possible because the light is controlled by electron transfer and an external electrical field without any mechanical moving parts. For example, when it is applied to a laser radar, higher speed object recognition will be possible compared with conventional technology. As the device features a simple structure of electrodes formed on a crystal and the chip size is very small, the optical polarization module can be mounted in a small-size housing of only 2 x 3 x 6cm. Flexible optical scanner operation is realized by devising an appropriate voltage supply method, because the voltage supply and direction of travel of the light beam correspond to each other, and the operation speed is very high. For example, the light scan angle can be made to move instantly among multiple points by inputting a digital signal, while continuous scan operation is realized by inputting an analog signal. In consequence, the device will be optimum for applications such as a laser radar or a laser scan display, by making use of its flexible operability from continuous operation to arbitrary scanning. Key Features: Wide Deflection Angle up to 150 mrad High Response Frequency up to 100 kHz Broad Wavelength Range 488 to 3,500 nm Polarization Maintaining Single Mode Optical Filter Applications: Laser Processing; Laser Scanning Microscopes; 3D-Measurement; Optical Communication; Displays; Optical Storage Media; Imaging; Sensing; Printers; Copiers; Forward Monitoring Sensors in Automobiles; OCT Swept Laser Source and Imaging; Flow Cytometry; High-speed Spectrometers; Optical Switches; Pulse Pickers

Optical Deflection ±0.393 rad; Processing Speed 30-100 rad/s; Positioning Speed 30-100 rad/s; Input Aperture 10, 14, 20 mm; Digital Control via SL2-100 or XY2-100 Protocol Raylase’s MINISCAN III 2-axis deflection units offer very stable digital control, which further improves noise and drift values, thereby making the systems even more reliable and robust. Both the XY2-100 16 Bit and the SL2-100 20 Bit protocols can be used for digital control with the digital interface. A corresponding cable defines the use of the protocol. Lenses, protective glass, and mirror substrates and coatings are available for many standard laser types, wavelengths, power densities, focal lengths and processing areas. This allows to handle a wide range of tasks with best quality and optimized throughput. Speed and dynamic responses are guaranteed, thanks to digital control and powerful PWM output stages. We would also be happy to help you put together the perfect configuration for your application – get in touch with the AMS Technologies deflection experts now to discuss your project’s requirements! Key Features: Digitally Controlled, Low Noise and Drift Control: Via SL2-100 Protocol 20 Bit or XY2-100 Protocol 16 Bit Robust and Dust-proof for Industrial Applications Various Mirror Substrates and Coatings for Marking, Hatching (AM SLM / SLS) and Cleaning Available Input Apertures: 10, 14, 20 mm Optical Deflection (typ.): ±0.393 rad Resolution XY2-100, 16 Bit: 12 µrad Resolution SL2-100, 20 Bit: 0.76 µrad Repeatability (RMS): <2.0 µrad Position Noise (RMS): <3.2, <4.5 µrad Max. Temperature Drift: 15 ppm/K Gain, 10 µrad/K Offset Long-term Drift (8 h): <80 µrad Beam Displacement: 12.4, 17, 26 mm Tuning: M, MA, VC, C Writing Speed with High/Good Writing Quality: 600 to 1000 cps Processing Speed: 30 to 100 rad/s Positioning Speed: 30 to 100 rad/s Tracking Error: 0.13 to 0.34 ms Step Response Time (@1% of Full Scale): 0.30 to 1.01 ms Power Supply: +30/+48 VDC, 2 A RMS, max. 5 A Temperature Range: +15°C to +35°C Protection: IP64 Dimensions: 100.0 x 77.0 x 81.5/83.0 mm, 134.0 x 98.0 x 100.3 mm, 145.0 x 116.0 x 103.5 mm Weight (w/o Objective): Approx. 0.9, 2.0, 2.5 kg Applications: Hatching of Surfaces in Additive Manufacturing with High Dynamic Performances; Ablation and Cleaning of Surfaces at High Speed; Challenging Marking Tasks

Surface Finish Gold, Aluminium; Mirror Size 2.5x3.6, 16x11 mm; Tilt Angle ±1.5°, ±5°; Reflectivity 95%, 98%; Max. Actuation Current 60, 200 mA Sercalo Microtechnology’s MM series of miniature MEMS magnetic actuated mirrors and deflection units are used for advanced optical beam steering and pointing. These MEMS micromirrors offer large surface areas and are best suited in applications requiring DC pointing together with dynamic scanning. Using magnetic actuation, the 2D micromirrors’ deflection angle is set linearly with the driving current. They are designed for DC operation as well as scanning and can be used for static or dynamic beam steering with a large surface area of up to 16 x 11 mm and up to ±5° deflection. MM2536-2 dual-axes MEMS magnetic micromirrors with gold or aluminium surface finish are operated in open loop and are currently available with a mirror that has a reflective surface of 2.5 x 3.6 mm. These MEMS micromirrors are best suited in beam steering and scanning applications where small size and low power consumption are important. MM-160110-2 fine-pointing dual-axes MEMS magnetic micromirrors have a large reflective surface of 16 mm x11 mm with gold or aluminium surface finish. As an option, the devices can include an internal optical feedback sensor for closed loop operation. Key Features: Large Mirrors: 2.5 x 3.6 mm, 16.0 x 11.0 mm Surface Finish: Gold (Au) or Aluminium (Al) Reflectivity (800 to 2000 nm): ≥95%, ≥98% 2 Actuation Axes Tilt Angle DC (Mechanical): ≤±1.5°, ≤ ±5° Maximum Angle of Incidence: 45° Linear Control Fine Pointing (MM-160110-2) Resonance Frequency X: 330 Hz, 390 Hz (Typ.) Resonance Frequency Y: 180 Hz, 240 Hz (Typ.) Maximum Actuation Current: 60 mA, 200 mA Maximum Actuation Power: 0.5 W, 1 W Operating Temperature: -5°C to +85°C Dimensions: 14 x 14 x 5 mm, 31 x 46 x 11 mm Applications: 2D Static and Dynamic Optical Beam Steering; 2D Optical Scanner Devices; Instrumentation Measurements

Interface PCIe, 1-Gbps-Ethernet; Interface to Deflection Unit SL2-100, XY2-100, RL3-100; Resolution 16, 20 Bit; Output Step Period 10, 20 µs; Memory 1-32 GB In addition to innovative electronic components built into its deflection units, Raylase’s electronics portfolio consists of intelligent control cards to drive the deflection units. These also function as an interface between software and mechanical systems with the capacity to control external machines. The SP-ICE-1 PCIe PRO control card offers highest precision, flexibility, and easy integration. Windows-based DLLs are included. Scanning motion and laser control signals are precisely synchronized with the on-board processor unit. Dual buffering allows for downloading of the next job whilst executing the current job. The SP-ICE-1 PCIe PRO control card interfaces to the deflection unit via the XY2-100 standard/enhanced protocol. Laser control signals are: laser modulation, laser gate, first pulse suppression and lamp/diode current. Analog and digital signals are available. Buffered and unbuffered I/O ports are available for interfacing to external equipment. The SP-ICE-3 control card is the universal solution for every laser system with deflection units. With its multiple individually configurable ports it fits everywhere, even at highly specific requirements. Thanks to the .NET programming environment and the flexibility of the SP-ICE-3 control card, a broad variety of applications can be solved quickly. The SP-ICE-3 controls up to 2 deflection units via the SL2-100 or RL3-100 protocol with 20 Bit position resolution and 10 μs step period. It can log up to 24 million measurements from the deflection unit. This allows for system optimization during development and continuous monitoring during operation. With its 1 GB RAM and a 32 GB MicroSD-card, users may upload and store numerous highly complex laser programs to the card at once. Five configurable I/O-ports with up to 24 bit, two quadrature decoders, a USB 2.0 and a RS232 interface make the SP-ICE-3 your central control unit for laser processes. Key Features: Micro SD Card With 4 GB On-board Memory (32 GB for SP-ICE-3) Master-slave and Master-master Operation Controls 2-, 3-, 4- and 5-Axis Deflection Units and All Common Laser Sources (SP-ICE-3) Speed- and Position-dependent Laser Control (SP-ICE-3) Marking-and-processing-On-The-Fly (MOTF, Optional for SP-ICE-1 PCIe PRO) Interface to Deflection Unit: XY2-100 (16 Bit) Protocol Enhanced With Feedback Channel, SL2-100 and RL3-100 (20 Bit) Protocol (SP-ICE-3) Interface to PC (Control): PCIe, 1-Gbps-Ethernet (SP-IC-3) Resolution: 16, 20 Bit Output Step Period: 10, 20 µs Can be Used as External Control Card via Gigabit Ethernet (SP-ICE-3) Applications: Driving of Raylase Deflection Units; Interface Between Software and Mechanical Systems; Control or External Machines

Max. Actuation Voltage 70 V; Package TO46, TO5; Reflectivity 95%; Mirror Size 1 mm to 2.5 mm; Tilt Angle ±2.5° to ±4.5° Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has superior DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm. The Sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feedback loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation. Key Features: Low Drift Two Independent Axes Continuous Tilting Single Mirror 1 mm Diameter Mirror High Fill Factor Applications: Optical Beam Steering; Reconfigurable Add-Drop Multiplexer; Vibration Control in Free Space Optics; Optical Processor