MM MEMS Micromirrors

Surface Finish Gold, Aluminium; Mirror Size 2.5x3.6, 16x11 mm; Tilt Angle ±1.5°, ±5°; Reflectivity 95%, 98%; Max. Actuation Current 60, 200 mA

Sercalo Microtechnology’s MM series of miniature MEMS magnetic actuated mirrors and deflection units are used for advanced optical beam steering and pointing. These MEMS micromirrors offer large surface areas and are best suited in applications requiring DC pointing together with dynamic scanning.

Using magnetic actuation, the 2D micromirrors’ deflection angle is set linearly with the driving current. They are designed for DC operation as well as scanning and can be used for static or dynamic beam steering with a large surface area of up to 16 x 11 mm and up to ±5° deflection.

MM2536-2 dual-axes MEMS magnetic micromirrors with gold or aluminium surface finish are operated in open loop and are currently available with a mirror that has a reflective surface of 2.5 x 3.6 mm. These MEMS micromirrors are best suited in beam steering and scanning applications where small size and low power consumption are important.

MM-160110-2 fine-pointing dual-axes MEMS magnetic micromirrors have a large reflective surface of 16 mm x11 mm with gold or aluminium surface finish. As an option, the devices can include an internal optical feedback sensor for closed loop operation.

Key Features:

• Large Mirrors: 2.5 x 3.6 mm, 16.0 x 11.0 mm
• Surface Finish: Gold (Au) or Aluminium (Al)
• Reflectivity (800 to 2000 nm): ≥95%, ≥98%
• 2 Actuation Axes
• Tilt Angle DC (Mechanical): ≤±1.5°, ≤ ±5°
• Maximum Angle of Incidence: 45°
• Linear Control
• Fine Pointing (MM-160110-2)
• Resonance Frequency X: 330 Hz, 390 Hz (Typ.)
• Resonance Frequency Y: 180 Hz, 240 Hz (Typ.)
• Maximum Actuation Current: 60 mA, 200 mA
• Maximum Actuation Power: 0.5 W, 1 W
• Operating Temperature: -5°C to +85°C
• Dimensions: 14 x 14 x 5 mm, 31 x 46 x 11 mm

Applications: 2D Static and Dynamic Optical Beam Steering; 2D Optical Scanner Devices; Instrumentation Measurements